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Semiconductor Fab Expansion — Wuxi

Semiconductor Fab Expansion — Wuxi

Semiconductor Fab Expansion — Wuxi

Client: Wuxi Semiconductor Tech

Project Scope

Design and installation of an 8,500 m² semiconductor cleanroom addition for a major chip manufacturer. The facility features Class 10 (ISO 4) lithography bays and Class 100 (ISO 5) general fab areas with stringent vibration, ESD, and AMC controls.

Highlights

  1. Micro-vibration isolation: VC-D rating in lithography bays
  2. Full raised-floor return-air plenum with perforated panels
  3. Chemical filtration for airborne molecular contamination (AMC)
  4. 100% ULPA ceiling coverage in ISO 4 zones